Phosphoric acid Electronic Grade belongs to high purity phosphoric acid, widely used in large-scale integrated circuit, thin film liquid crystal display (TFT-LCD) and other microelectronics industry. Phosphoric acid Electronic Grade is mainly used for chip cleaning and etching, and its purity and cleanliness have a great impact on the yield, electrical performance and reliability of electronic components. Specifications: Items Units E1(LCD grade) E2(IC grade) H3PO4 % 85-87 85-87 H3PO3 % ≤0.005 ≤0.001 NO3 mg/kg ≤5 ≤0.5 SO4 mg/kg ≤10 ≤5 Cl …
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